Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
WD2. Modeling and Simulation of CCP and ICP
July 25 (Wed.)
13:20-14:50 ~
[WD2-1]
13:20-13:50 ~
Room D (#115)
[Invited] Fluid and PIC Simulations on Electronegative SiH4 and O2 Discharges in RF CCPs
Wen-Zhu Jia, Li Wang, Yuan-Hong Song, and You-Nian Wang (Dalian Univ. of Tech., China)
[WD2-2]
13:50-14:10 ~
Room D (#115)
GEC-CCP Modelling Using Two-Dimensional Fluid Simulation Base on Stabilized Finite Element Method
Hyonu Chang (NFRI, Korea)
[WD2-3]
14:10-14:30 ~
Room D (#115)
Deduction of a Novel Electron Energy Equation in Fluid Model and Its Applications in Predicting the Electron Temperature Behavior of Inductive Coupled Plasmas
Shu-Xia Zhao (Dalian Univ. of Tech., China)
[WD2-4]
14:30-14:50 ~
Room D (#115)
Energy Relaxation Kinetics for the Control of Electron Energy Distributions and Electron Heating Modes in a Capacitively Coupled RF Plasma
Jung Yeol Lee, Chang Ho Kim, and Jung Yeol Lee (Pusan Nat`l Univ., Korea)
Type
Authors
Session Title
Paper Title
