Date
Place
- Room D (#115)
- WD2. Modeling and Simulation of CCP and ICP
- July 25 (Wed.)
- 13:20-14:50 ~
- [WD2-1]
- 13:20-13:50 ~
- Title:[Invited] Fluid and PIC Simulations on Electronegative SiH4 and O2 Discharges in RF CCPs
- Wen-Zhu Jia, Li Wang, Yuan-Hong Song, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download
