Date
Place
- Room D (#115)
- WD2. Modeling and Simulation of CCP and ICP
- July 25 (Wed.)
- 13:20-14:50 ~
- [WD2-4]
- 14:30-14:50 ~
- Title:Energy Relaxation Kinetics for the Control of Electron Energy Distributions and Electron Heating Modes in a Capacitively Coupled RF Plasma
- Jung Yeol Lee, Chang Ho Kim, and Jung Yeol Lee (Pusan Nat`l Univ., Korea)
Abstract Download
