Date
Place
- Room D (#115)
- WD2. Modeling and Simulation of CCP and ICP
- July 25 (Wed.)
- 13:20-14:50 ~
- [WD2-3]
- 14:10-14:30 ~
- Title:Deduction of a Novel Electron Energy Equation in Fluid Model and Its Applications in Predicting the Electron Temperature Behavior of Inductive Coupled Plasmas
- Shu-Xia Zhao (Dalian Univ. of Tech., China)
Abstract Download
