Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
TD2. Plasma Sources and Technologies
July 26 (Thu.)
13:20-15:10 ~
[TD2-1]
13:20-13:50 ~
Room D (#115)
[Invited] The Experimental and Numerical Investigations of Electron Characteristics in 2 MHz and 13.56 MHz Inductively Coupled Hydrogen Plasmas
Fei Gao, Hong Li, De-Qi Wen, and You-Nian Wang (Dalian Univ. of Tech., China)
[TD2-2]
13:50-14:20 ~
Room D (#115)
[Invited] Inductively-Coupled Plasma and Laser-Produced Plasma Source Researches at GIST
Hyyong Suk, Keekon Kang, and Sihyeon Lee (GIST, Korea)
[TD2-3]
14:20-14:50 ~
Room D (#115)
[Invited] Experimental and Computational Investigations on Striations in Electronegative Capacitively Couple rf Discharges
Yong-Xin Liu
1
, Ihor Korolov
2
, Edmund Schungel
3
, Zoltan Donko
4
, Julian Schulze
2
, and You-Nian Wang1 (
1
Dalian Univ. of Tech., China,
2
Ruhr-Univ., Germany,
3
Evatec AG, Switzerland,
4
Hungarian Academy of Sciences, Hungary)
[TD2-4]
14:50-15:10 ~
Room D (#115)
Modulation of Electron Energy Distribution Functions and Plasma Parameters in a Dual-Frequency Cylindrical Inductively Coupled Plasma Source
Yue Hua, Jian Song, Zeyu Hao, Gailing Zhang, and Chunsheng Ren (Dalian Univ. of Tech., China)
Type
Authors
Session Title
Paper Title
