Date
Place
- Room D (#115)
- TD2. Plasma Sources and Technologies
- July 26 (Thu.)
- 13:20-15:10 ~
- [TD2-4]
- 14:50-15:10 ~
- Title:Modulation of Electron Energy Distribution Functions and Plasma Parameters in a Dual-Frequency Cylindrical Inductively Coupled Plasma Source
- Yue Hua, Jian Song, Zeyu Hao, Gailing Zhang, and Chunsheng Ren (Dalian Univ. of Tech., China)
Abstract Download
