Date
Place
- Room D (#115)
- TD2. Plasma Sources and Technologies
- July 26 (Thu.)
- 13:20-15:10 ~
- [TD2-3]
- 14:20-14:50 ~
- Title:[Invited] Experimental and Computational Investigations on Striations in Electronegative Capacitively Couple rf Discharges
- Yong-Xin Liu1, Ihor Korolov2, Edmund Schungel3, Zoltan Donko4, Julian Schulze2, and You-Nian Wang1 (1Dalian Univ. of Tech., China, 2Ruhr-Univ., Germany, 3Evatec AG, Switzerland, 4Hungarian Academy of Sciences, Hungary)
Abstract Download
