Date
Place
- Room D (#115)
- TD2. Plasma Sources and Technologies
- July 26 (Thu.)
- 13:20-15:10 ~
- [TD2-1]
- 13:20-13:50 ~
- Title:[Invited] The Experimental and Numerical Investigations of Electron Characteristics in 2 MHz and 13.56 MHz Inductively Coupled Hydrogen Plasmas
- Fei Gao, Hong Li, De-Qi Wen, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download
