Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
SD2. Plasma Sources and Technologies
July 28 (Sat.)
10:50-12:30 ~
[SD2-1]
10:50-11:10 ~
Room D (#115)
The Effects of Asymmetric Secondary Electron Emission Induced by Different Materials Electrodes in Capacitively Coupled Plasmas
Jing-Yu Sun, De-Qi Wen, Yong-Xin Liu, and You-Nian Wang (Dalian Univ. of Tech., China)
[SD2-2]
11:10-11:30 ~
Room D (#115)
Numerical Study on Tempo-Spatially Varying Thermofluid Field in Tandem Type of Modulated Induction Thermal Plasmas-Effect of Lower Coil Current Modulation
Kazuki Onda
1
, Kotaro Shimizu
1
, Yasunori Tanaka
1
, Yoshihiko Uesugi
1
, Tatsuo Ishijima
1
, Shiori Sueyasu
2
, Shu Watanabe
2
, and Keitaro Nakamura2 (
1
Kanazawa Univ., Japan,
2
Nisshin Seifun Group Inc., Japan)
[SD2-3]
11:30-11:50 ~
Room D (#115)
Investigations of Argon Arc Attachment Modes on the Anode: The Effect of Gas Temperature
Su-Rong Sun and Hai-Xing Wang (Beihang Univ., China)
[SD2-4]
11:50-12:10 ~
Room D (#115)
Voltage Balancing of External Antenna for Inductively Coupled Plasma for Mixture of Oxygen, Nitrogen, Hydrogen, Ammonia, and Forming Gas
Jong Woo Park, Sang Moon Yoo, Hyo Jeong Seo, Aram Kim, and Sung Jin Yoon (PSK Inc., Korea)
Type
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