Date
Place
- Room D (#115)
- SD2. Plasma Sources and Technologies
- July 28 (Sat.)
- 10:50-12:30 ~
- [SD2-1]
- 10:50-11:10 ~
- Title:The Effects of Asymmetric Secondary Electron Emission Induced by Different Materials Electrodes in Capacitively Coupled Plasmas
- Jing-Yu Sun, De-Qi Wen, Yong-Xin Liu, and You-Nian Wang (Dalian Univ. of Tech., China)
Abstract Download
