Date
Place
- Room D (#115)
- SD2. Plasma Sources and Technologies
- July 28 (Sat.)
- 10:50-12:30 ~
- [SD2-2]
- 11:10-11:30 ~
- Title:Numerical Study on Tempo-Spatially Varying Thermofluid Field in Tandem Type of Modulated Induction Thermal Plasmas-Effect of Lower Coil Current Modulation
- Kazuki Onda1, Kotaro Shimizu1, Yasunori Tanaka1, Yoshihiko Uesugi1, Tatsuo Ishijima1, Shiori Sueyasu2, Shu Watanabe2, and Keitaro Nakamura2 (1Kanazawa Univ., Japan, 2Nisshin Seifun Group Inc., Japan)
Abstract Download
