Date
Place
- Room D (#115)
- SD2. Plasma Sources and Technologies
- July 28 (Sat.)
- 10:50-12:30 ~
- [SD2-4]
- 11:50-12:10 ~
- Title:Voltage Balancing of External Antenna for Inductively Coupled Plasma for Mixture of Oxygen, Nitrogen, Hydrogen, Ammonia, and Forming Gas
- Jong Woo Park, Sang Moon Yoo, Hyo Jeong Seo, Aram Kim, and Sung Jin Yoon (PSK Inc., Korea)
Abstract Download
