Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room C (#114)
SC1. Plasma ALD / PECVD
July 28 (Sat.)
09:00-10:40 ~
[SC1-1]
09:00-09:25 ~
Room C (#114)
[Invited] Atomic Layer Deposition of Rare Earth Oxides for Surface Energy Control
Han-Bo-Ram Lee (Incheon Nat`l Univ., Korea)
[SC1-2]
09:25-09:50 ~
Room C (#114)
[Invited] BN Electron-Enhanced ALD at Room Temperature and Prospects for Area Selective Deposition
Steven George, Jaclyn Sprenger, Andrew Cavanagh, and Huaxing Sun (Univ. of Colorado, USA)
[SC1-3]
09:50-10:15 ~
Room C (#114)
[Invited] Ion-Surface Interaction during Plasma-Enhanced ALD and How It Can Be Used to Tailor Film Properties
Erwin Kessels (Eindhoven Univ, of Tech., The Netherlands)
[SC1-4]
10:15-10:40 ~
Room C (#114)
[Invited] A Toolbox for an All-ALD Earth-Abundant Resonant Tunneling Junction Solar Cell
Sean T. Barry
1
, Goran Ba?i?
1
, David Zanders
2
, Jason P. Masuda
3
, Anjana Devi
2
, and Steven P. McGarry1 (
1
Carleton Univ., Canada,
2
Ruhr-Univ. Bochum, Germany,
3
Saint Mary`s Univ., Canada)
Type
Authors
Session Title
Paper Title