Date
Place
- Room C (#114)
- SC1. Plasma ALD / PECVD
- July 28 (Sat.)
- 09:00-10:40 ~
- [SC1-3]
- 09:50-10:15 ~
- Title:[Invited] Ion-Surface Interaction during Plasma-Enhanced ALD and How It Can Be Used to Tailor Film Properties
- Erwin Kessels (Eindhoven Univ, of Tech., The Netherlands)
Abstract Download
