Date
Place
- Room C (#114)
- SC1. Plasma ALD / PECVD
- July 28 (Sat.)
- 09:00-10:40 ~
- [SC1-2]
- 09:25-09:50 ~
- Title:[Invited] BN Electron-Enhanced ALD at Room Temperature and Prospects for Area Selective Deposition
- Steven George, Jaclyn Sprenger, Andrew Cavanagh, and Huaxing Sun (Univ. of Colorado, USA)
Abstract Download
