Program
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ISPB 2018
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July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
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ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room C (#114)
SC1. Plasma ALD / PECVD
July 28 (Sat.)
09:00-10:40 ~
[SC1-1]
09:00-09:25 ~
Title:
[Invited] Atomic Layer Deposition of Rare Earth Oxides for Surface Energy Control
Han-Bo-Ram Lee (Incheon Nat`l Univ., Korea)
Abstract Download
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