Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
WD1. Modeling and Simulation of Plasma-Surface Interaction
July 25 (Wed.)
09:00-10:30 ~
[WD1-1]
09:00-09:30 ~
Room D (#115)
[Invited] Realistic Treatment of Plasma-Surface Interactions in Simulations of Low Temperature Plasmas
Julian Schulze
1
, Aranka Derzsi
2
, Manaswi Daksha
1
, Benedek Horvath
3
, Birk Berger
4
, Ihor Korolov
1
, Steven Brandt
2
, Mark Koepke
2
, Zoltan Donko
3
, and Peter Awakowicz1 (
1
Ruhr-Univ. Bochum, Germany,
2
West Virginia Univ., USA,
3
Hungarian Academy of Sciences, Hungary,
4
Brandenburg Univ. of Tech., Germany)
[WD1-2]
09:30-10:00 ~
Room D (#115)
[Invited] Modeling of Plasma-Enhanced ALD for Silicon Oxide Films as Clarification of Fundamental Deposition Mechanism
Kosuke Yamamoto, Ayuta Suzuki, Munehito Kagaya, Hu Li, Masaaki Matsukuma, and Tsuyoshi Moriya (Tokyo Electron Tech. Solutions Ltd., Japan)
[WD1-3]
10:00-10:30 ~
Room D (#115)
[Invited] Importance of Consideration of Thermal Diffusion Effects in a Non-Isothermal Capacitively Coupled Plasma Reactor
Ho Jun Kim (Dong-A Univ., Korea)
Type
Authors
Session Title
Paper Title
