Date
Place
- Room D (#115)
- WD1. Modeling and Simulation of Plasma-Surface Interaction
- July 25 (Wed.)
- 09:00-10:30 ~
- [WD1-3]
- 10:00-10:30 ~
- Title:[Invited] Importance of Consideration of Thermal Diffusion Effects in a Non-Isothermal Capacitively Coupled Plasma Reactor
- Ho Jun Kim (Dong-A Univ., Korea)
Abstract Download
