Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
TD1. Plasma Sources and Technologies
July 26 (Thu.)
09:00-10:40 ~
[TD1-1]
09:00-09:40 ~
Room D (#115)
[Keynote] INCA: A New Scalable Large Area Plasma Source at Low Pressures
Uwe Czarnetzki, Philipp Ahr, Tsanko Tsankov, and Jahn Kuhfeld (Ruhr-Univ. Bochum, Germany)
[TD1-2]
09:40-10:10 ~
Room D (#115)
[Invited] Challenges for Future rf Driven Plasma Systems
Rod Boswell (Australian Nat`l Univ., Autralia)
[TD1-3]
10:10-10:40 ~
Room D (#115)
[Invited] Microwave Plasma Sources Based on Microstrip Line for Material Processing
Jaeho Kim and Hajime Sakakita (AIST, Japan)
Type
Authors
Session Title
Paper Title
