Date
Place
- Room D (#115)
- TD1. Plasma Sources and Technologies
- July 26 (Thu.)
- 09:00-10:40 ~
- [TD1-1]
- 09:00-09:40 ~
- Title:[Keynote] INCA: A New Scalable Large Area Plasma Source at Low Pressures
- Uwe Czarnetzki, Philipp Ahr, Tsanko Tsankov, and Jahn Kuhfeld (Ruhr-Univ. Bochum, Germany)
Abstract Download
