Date
Place
- Room D (#115)
- TD1. Plasma Sources and Technologies
- July 26 (Thu.)
- 09:00-10:40 ~
- [TD1-3]
- 10:10-10:40 ~
- Title:[Invited] Microwave Plasma Sources Based on Microstrip Line for Material Processing
- Jaeho Kim and Hajime Sakakita (AIST, Japan)
Abstract Download
