Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room C (#114)
SC2. Plasma ALD / PECVD
July 28 (Sat.)
10:50-12:30 ~
[SC2-1]
10:50-11:15 ~
Room C (#114)
[Invited] Research in Thermal Area Selective Atomic Layer Deposition and Atomic Layer Etching for Advanced Device Patterning
Gregory Parsons (North Carolina State Univ., USA)
[SC2-2]
11:15-11:40 ~
Room C (#114)
[Invited] ALD-Induced Blending of Polymers with Ceramics for Novel Functional Hybrids
Mato Knez (CIC nanoGUNE, Spain)
[SC2-3]
11:40-12:05 ~
Room C (#114)
[Invited] Remote Plasma ALD for Low K Dielectric
Hyeongtag Jeon (Hanyang Univ., Korea)
[SC2-4]
12:05-12:30 ~
Room C (#114)
[Invited] Plasma-Assisted Atomic Layer Deposition of SiNx
Sumit Agarwal (Colorado School of Mines, USA)
Type
Authors
Session Title
Paper Title
