Date
Place
- Room C (#114)
- SC2. Plasma ALD / PECVD
- July 28 (Sat.)
- 10:50-12:30 ~
- [SC2-1]
- 10:50-11:15 ~
- Title:[Invited] Research in Thermal Area Selective Atomic Layer Deposition and Atomic Layer Etching for Advanced Device Patterning
- Gregory Parsons (North Carolina State Univ., USA)
Abstract Download
