Program
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ISPB 2018
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July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room C (#114)
SC2. Plasma ALD / PECVD
July 28 (Sat.)
10:50-12:30 ~
[SC2-4]
12:05-12:30 ~
Title:
[Invited] Plasma-Assisted Atomic Layer Deposition of SiNx
Sumit Agarwal (Colorado School of Mines, USA)
Abstract Download
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