Program
Program
Plenary Speakers
Invited Speakers
Tutorial Sessions
ISPB 2018
Floor Plan
Date
Select
July 25 (Wed.)
July 26 (Thu.)
July 27 (Fri.)
July 28 (Sat.)
Place
ALL PLACE
Room A (#104~106)
Room B (#113)
Room C (#114)
Room D (#115)
Room E (#107~108)
Room F (#117~118)
Room Room D (#115)
TD3. Plasma Sources and Technologies
July 26 (Thu.)
15:30-17:40 ~
[TD3-1]
15:30-16:00 ~
Room D (#115)
[Invited] Performance and Plasma Characteristics of Low-Power Ammonia Arcjet Thruster
Xian Meng, Wenxia Pan, Chunling Yang, and Chengkang Wu (Chinese Academy of Sciences, China)
[TD3-2]
16:00-16:30 ~
Room D (#115)
[Invited] The Triple DC Plasma Torch System for Nanoparticle Synthesis
Tae-Hee Kim, Jeong-Hwan Oh, Byeong-Il Min, Juyoung Ko, Minseok Kim, Yong Hee Lee, and Sooseok Choi (Jeju Nat`l Univ., Korea)
[TD3-3]
16:30-17:00 ~
Room D (#115)
[Invited] Investigation of Characteristics of Multiphase AC Arc by High-Speed Visualization
Takafumi Okuma
1
, Hisao Nagai
1
, Takeshi Koiwasaki
1
, Manabu Tanaka
2
, and Takayuki Watanabe2 (
1
Panasonic Corporation, Japan,
2
Kyushu Univ., Japan)
[TD3-4]
17:00-17:20 ~
Room D (#115)
Fluctuation Phenomena of Plasma Jet in Long DC Arc with Ring-Shaped Anode
Manabu Tanaka
1
, Hirohiko Soeda
1
, Takayuki Watanabe
1
, and Tomohiro Koga2 (
1
Kyushu Univ., Japan,
2
Clean Tech., Japan)
[TD3-5]
17:20-17:40 ~
Room D (#115)
Study on Uniform Plasma Generation in Electron Cyclotron Resonance Plasma Etching Reactor
Hitoshi Tamura
1
, Tsutomu Tetsuka
2
, Daisuke Kuwahara
3
, and Shunjiro Shinohara3 (
1
Hitachi High-Technologies Corporation, Japan,
2
Hitachi Ltd., Japan,
3
Tokyo Univ. of Agriculture and Tech., Japan)
Type
Authors
Session Title
Paper Title
