Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-098]
- 17:30-19:00 ~
- Title:Designand Fabrication of Silicon Photonics Grating Couplers for Spatially Resolved Plasma Uniformity Monitoring Sensor
- Minhee Lee and Sang Jeen Hong (Myongji Univ., Korea)
Abstract Download