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Program

Date
Place
  • Room F (#117~118)
  • WP. Poster Session
  • July 25 (Wed.)
  • 17:30-19:00 ~
  • [WP-078]
  • 17:30-19:00 ~
  • Title:Numericalsimulation of Aemperature and Chemical Species Distributions in HFCVD for Diamond Film
  • Yong Hee Lee1, Chang Won Song2, Tae-Hee Kim1, Kwang Ho Kim2, and Sooseok Choi1 (1Jeju Nat`l Univ., Korea, 2Pusan Nat`l Univ., Korea)

  • Abstract Download