Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-070]
- 17:30-19:00 ~
- Title:Two-Dimensional Simulation of an Inductively Coupled Plasma Discharge of Ar/O2 Including Heat Transfer, Gas Flow, and EEDF
- Donggil Kim1, EunHee Choi1, YeJin Shon1, Deuk-Chul Kwon2, Jea-Hong Jeon1, and HeeHwan Choe1 (1Korea Aerospace Univ., Korea, 2NFRI, Korea)
Abstract Download
