Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-069]
- 17:30-19:00 ~
- Title:Analysis of the Effect of Target Erosion Magnetron Sputtering on Deposition Profile Using 2D and 3D Particle-in-Cell Simulation Combined with a Ghost Fluid Method
- Sehun Oh, Min Young Hur, and Hae June Lee (Pusan Nat`l Univ., Korea)
Abstract Download
