Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-063]
- 17:30-19:00 ~
- Title:Validity Analysis of Ion Drift Diffusion Approximation for Fluid Dynamics Simulation Model in CCP Discharge
- Wenli Cui and Shuxia Zhao (Dalian Univ. of Tech., China)
Abstract Download
