Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-051]
- 17:30-19:00 ~
- Title:Synthesis and Characterization of Hydrofluoroether as an Environmentally Friendly Replacement of Perfluorocarbon Gases in Etching Process
- Sang Goo Lee1, Jong-Wook Ha1, In Jun Park1, Soo-Bok Lee1, Chang-Goo Kim2, and Heeyeop Chae3 (1KRICT, Korea, 2Ajou Univ., Korea, 3Sungkyunkwan Univ., Korea)
Abstract Download
