Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-050]
- 17:30-19:00 ~
- Title:Plasma-Enhanced Chamber Cleaning with CF3I Gas
- In-Sung Park, Seon Yong Kim, Taehoon Lee, Jinho Ahn, Jinseong Park, and Tae-Hun Shim (Hanyang Univ., Korea)
Abstract Download
