Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-049]
- 17:30-19:00 ~
- Title:Characterization of SiO2 Plasma Etching with Different Liquid Fluorocarbon Precursor Using Quadrupole Mass Spectroscopy
- Seung-Wan Yoo1, Chul-Hee Cho1, Hee-Jung Yeom2, Jung-Hyung Kim2, and Shin-Jae You1 (1Chungnam Nat`l Univ., Korea, 2KRISS, Korea)
Abstract Download
