Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-046]
- 17:30-19:00 ~
- Title:SiO2 Etch Characteristics and Environmental Impact of Ar/C3F6O and Ar/C4F8/O2
- Soo Gang Kim, Kyung Che Yang, Da In Sung, Ye Ji Shin, Hyun Woo Tak, Jun Ki Jang, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
Abstract Download
