Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-044]
- 17:30-19:00 ~
- Title:Dry Etching of SiO2 Layers Using Low Global Warming Potentials Gases
- Yongjae Kim, Taehwan Cha, Sangin Lee, Yegeun Cho, and Heeyeop Chae (Sungkyunkwan Univ., Korea)
Abstract Download
