Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-043]
- 17:30-19:00 ~
- Title:A Comparative Study of CF4, C4F8 and C7F14 Plasma for Dry Etch Processing
- Da In Sung, Hyun Woo Tak, Kyung Chae Yang, Dong Woo Kim, and Geun Young Yeom (Sungkyunkwan Univ., Korea)
Abstract Download
