Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-042]
- 17:30-19:00 ~
- Title:Etching Characteristics of SiON Thin Films in CF4+CHF3+O2 Inductively Coupled Plasma
- Jihun Kim, Junmyung Lee, and Kwang-Ho Kwon (Korea Univ., Korea)
Abstract Download
