Date
Place
- Room F (#117~118)
- WP. Poster Session
- July 25 (Wed.)
- 17:30-19:00 ~
- [WP-040]
- 17:30-19:00 ~
- Title:Angular Dependence of SiO2 Etch Rates in Hexafluoroisopropanol Plasmas
- Jin-Su Park, Jun-Hyun Kim, and Chang-Koo Kim (Ajou Univ., Korea)
Abstract Download
