Date
Place
- Room A (#104~106)
- WA2. Plasmas for Environmental Technology
- July 25 (Wed.)
- 13:40-15:10 ~
- [WA2-3]
- 14:30-14:50 ~
- Title:Realistic Surface Reaction Modeling of Fluorocarbon Plasma Etch Process
- Hae Sung You, Yeong Geun Yook, Jae Hyeong Park, and Yeon Ho Im (Chonbuk Nat`l Univ., Korea)
Abstract Download
