Date
Place
- Room A (#104~106)
- WA2. Plasmas for Environmental Technology
- July 25 (Wed.)
- 13:40-15:10 ~
- [WA2-2]
- 14:10-14:30 ~
- Title:Plasma Etching of SiO2 Perfluorinated and Partially Fluorinated Fluoro Ethers
- Jun-Hyun Kim, Jin-Su Park, and Chang-Koo Kim (Ajou Univ., Korea)
Abstract Download
