Date
Place
- Room A (#104~106)
- WA1. Contamination Control in Semiconductor / Display Technologies
- July 25 (Wed.)
- 09:00-10:00,13:00-13:40 ~
- [WA1-3]
- 13:00-13:20 ~
- Title:Characterization of Atmospheric Electrodeless Microwave Plasma in Nitrogen
- Hojoong Sun, Jungwun Lee, and Moon Soo Bak (Sungkyunkwan Univ., Korea)
Abstract Download
