Date
Place
- Room A (#104~106)
- WA1. Contamination Control in Semiconductor / Display Technologies
- July 25 (Wed.)
- 09:00-10:00,13:00-13:40 ~
- [WA1-2]
- 09:30-10:00 ~
- Title:[Invited] Towards Automation of Quantitative Analysis of Various Digital Images for Material and Process Characterization
- Woo Sik Yoo (WaferMasters, Inc., USA)
Abstract Download