Date
Place
- Room A (#104~106)
- WA1. Contamination Control in Semiconductor / Display Technologies
- July 25 (Wed.)
- 09:00-10:00,13:00-13:40 ~
- [WA1-1]
- 09:00-09:30 ~
- Title:[Invited] Challenges of Particle Control Technology in the Semiconductor and Display Process Equipments
- Seungki Chae (Sungkyunkwan Univ., Korea)
Abstract Download
