Date
Place
- Room F (#117~118)
- TP. Poster Session
- July 26 (Thu.)
- 17:30-19:00 ~
- [TP-104]
- 17:30-19:00 ~
- Title:Nitridation of SiO2 Surface by VHF (162 MHz) Multi-Tile Push-Pull Plasma Source
- You Jin Ji1, Ki Seok Kim1, Ki Hyun Kim1, Ji Young Byun1, Soo Jung Lee1, Albert Rogers Ellingboe2, and Geun Young Yeom1 (1Sungkyunkwan Univ., Korea, 2Dublin City Univ., Ireland)
Abstract Download
