Date
Place
- Room C (#114)
- TC3. Next Generation Plasma Etching
- July 26 (Thu.)
- 15:30-17:00 ~
- [TC3-2]
- 16:00-16:30 ~
- Title:[Invited] Methods to Enable Plasma Etching of Transition Metals with Atomic Scale Precision
- Eric A Joseph, Hiroyuki Miyazoe, Nathan Marchack, John M. Papalia, Robert Bruce, and Sebastian U. Engelmann (IBM Thomas J. Watson Research Center, USA)
Abstract Download
