Date
Place
- Room A (#104~106)
- TA1. Sputtering Technologies
- July 26 (Thu.)
- 09:00-10:30 ~
- [TA1-1]
- 09:00-09:30 ~
- Title:[Invited] PIC-MC Simulation Study of Rotational Magnetron Sputtering
- Andreas Pflug, Michael Siemers, Thomas Melzig, and Michael Vergohl (Fraunhofer Inst. for Surface Engineering and Thin Films IST, Germany)
Abstract Download
