Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-100]
- 17:30-19:00 ~
- Title:Large-Scale Etching of Silicon Nitride Using a Linear ECR Plasma Source with?Reciprocating Substrate Motion
- SeongYong Kwon, HoWon Yoon, YunSung Jang, SeungMin Shin, Seungjun Yi, and MunPyo Hong (Korea Univ., Korea)
Abstract Download
