Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-041]
- 17:30-19:00 ~
- Title:Plasma Surface Kinetic Studies of Etch Process in Fluorocarbon Plasmas
- Chang Won-Seok1, Kwon Deuk-Chul1, Mi-young Song1, Dea-Chul Kim1, Jong-Sik Kim1, Young-woo Kim1, Jung-Sik Yoon1, Dong-Hun Yu2, Yeong-Geun Yook3, and Yeon-Ho Im3 (1NFRI, Korea, 2Kyungwon Tech Inc., Korea, 3Chonbuk Nat`l Univ., Korea)
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