Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-037]
- 17:30-19:00 ~
- Title:Development of Plasma Information Based Virtual Metrology (PI-VM) for Predicting Fine Variation of SiO2 Etching Depth
- Yunchang Jang, Hyun-Joon Roh, Sangwon Ryu, Ji-Won Kwon, and Gon-Ho Kim (1Seoul Nat`l Univ., Korea)
Abstract Download
