Date
Place
- Room F (#117~118)
- FP. Poster Session
- July 27 (Fri.)
- 17:30-19:00 ~
- [FP-033]
- 17:30-19:00 ~
- Title:Investigation of Fluorine Actinometric Coefficient in Capacitively Coupled SF6/Ar Plasma
- Ji-Won Kwon, Yunchang Jang, Sangwon Ryu, and Gon-Ho Kim (Seoul Nat`l Univ., Korea)
Abstract Download
